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To: beanman who wrote (18654)7/22/1998 9:53:00 PM
From: DTselentis  Respond to of 25960
 
As far as I've read and heard on this board and all other sources no one but Cymer has DUV lasers in use in a production line. Lambda and Komatsu lasers have been purchased for testing and evaluation purposes only.



To: beanman who wrote (18654)7/22/1998 9:54:00 PM
From: James Word  Read Replies (1) | Respond to of 25960
 
beanman: RE "Micrascan III and Cymer"

you asked: "Is anyone sure that SVG's Micrascan III is only being offered with a cymer laser, remember that Lambda is qualified there now also. "

99% sure. I would not be surprised if SVGL weren't hedging it's bets
by qualifying a second source for excimer lasers. However, It has almost zero reason for pushing them on customers. Cymer has tons more
production experience in real-life fab environments with a worldwide
service and support organization that is quite large.

Ive been shopping for DUV steppers for several months now. I have yet
to have any stepper company so much as mention Lambda or Komatsu as
an option. I imagine if you wanted one they would tell you that if
you go that route, you are on your own. You'll get no help from the
stepper company in maintaining it.

James Word