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To: Paul Engel who wrote (61776)8/4/1998 2:32:00 PM
From: Jeff Fox  Read Replies (1) | Respond to of 186894
 
Paul, re:"It appears they use a low, slow implant rate - only 20 wafers per DAY per implanter - that's about 1 wafer per hour per machine."

Opps, those blasted details do get in the way :)

Two questions,

1. What do you think of this "new" program of the IBM labs to use the popular press for technology announcements?

2. Could you give us your overview of RC characteristics and recent techniques to lower R's and C's?

Thanks,

Jeff