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To: John A. Stoops who wrote (19022)8/17/1998 2:50:00 PM
From: Ian@SI  Read Replies (2) | Respond to of 25960
 
John,

You're an optimist. The researcher is still competing for project funding; has not yet shown that a practical application is possible; getting into production testing within 10 years is far from a sure thing.

... especially when 248nm DUV light sources are being used to print 100nm feature sizes today(in a research lab environment). Given the rate at which current optical lithography is being extended, it's also far from certain that EUV or other processes will be economically justified 10 years from now.

FWIW,
Ian.