To: Ian@SI who wrote (19413 ) 9/6/1998 8:25:00 PM From: FJB Respond to of 25960
It is fairly easy to do a search of Electronic News or SBN, and come up with articles that totally corroborate Cymer's view of the DUV tool industry during the April 24, 1997 to September 26, 1997 time frame. Simply enter search terms like ASML, Canon, Nikon, DUV, or deep-UV and you can find a bunch. In addition, many press releases from photolithography tool suppliers were forecasting massive growth as well.electronicnews.com techweb.cmp.com For instance, Nikon estimated in mid-July they would ship 200 DUV tools in '97, a target they did not meet. Leadtimes for Nikon DUV scanners were about 18 months back then."That relates a little bit to the question about leadtimes. Maybe the downturn in 1996 brought things in a little bit, but a year or two ago, we would not have expected to ship 200 deep-UV tools in 1997. Then, 1997 was projected at well under 100, and this upsurge just came on in a rush. This is one of the difficult parts about this business. A customer decides its next fab will be a deep-UV fab, and that's 20 steppers. So these orders come in big bites when they happen. It is challenging to plan, and that gets reflected in leadtimes." electronicnews.com As late as February of '98 ASML was indicating a tremendous preference for DUV tools in the photolithography marketplace. Of course, some of this $170M order was probably not shipped, due to a lack of financing on the part of Hyundai.Hyundai's huge order last fall hasn't been cancelled or cut back in light of the economic turmoil in South Korea, according to Ms. Billat. Most of the order had been for deep-UV equipment, and now it is apparently all for DUV, with the I-line equipment being "de-booked," she said. With Hyundai delaying its fab in Scotland, all resources are now being diverted to the company's fabs in Korea, with the shift to 64-megabit DRAM production taking priority and driving increased demand for DUV, rather than I-line. electronicnews.com The bottom line is ASML, Canon, Nikon, and SVGI should make very good witnesses for Cymer in this case with respect to DUV tool demand and market growth. The only area in which there might be a problem in this case is "technical problems" with lasers. To the layperson/lawyer, putting an excimer laser in a difficult operating mode and the resulting performance degradation, might seem like a technical problem, when in reality, controlling the laser in a certain way is the problem. Bob