To: timwa who wrote (6590 ) 9/10/1998 12:05:00 AM From: Dick Martin Read Replies (1) | Respond to of 9695
Here is some comparative info on x-ray point sources:engr.orst.edu 4.2 X-ray SourcesThe simplest source for x-rays is the x-ray tube. The x-ray are emitted from the metal taget by focused, high energy electrons. The basic x-ray stationary anode tube is very inefficent. As can be seen in Figure 4.2 and Table 4.2 [18], other sources of x-ray lithography include rotary anode, laser plasma, discharge plasma, and a storage ring (synchotron radiation). Although the rotary anode delivers higher power for a short while, pitfalls include complexity, cost, and spot size. Laser plasma sources have a slightly higher input power than the first two, smaller source diameter, smaller prenumra, and a small percentage of hard x-rays. Using the discharge plasma source, there is a great increase in input power, soft x-ray power, resist flux, and throughput. Storage ring x-ray source is considered because its radiation is highly collimated and the prenumbra is an order of magnitude smaller than the other sources. [18] I suspect that because JMAR is building a point source that uses a number of Brightlight lasers there would be some loss of quality of the point source due to difficulties in focusing them all on the same spot. I think I read on another site that Sanders has a working relationship with SUSS which raises a question I have about JMAR. Why does not JMAR have a commercial partner The government (DARPA) is fine for research but they are not business people and their delays red tape are putting JMAR behind. In any case the synchrotron (storage ring) system seems to be the overall best choice but the discharge plasma may be good enough for the next few generations of circuits, is this system more expensive or cheaper than the JMAR point source? Dick Martin