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To: FJB who wrote (1866)	10/1/1998 10:40:00 PM
From: James Word	Read Replies (2) \| Respond to of 2946

Robert RE: "the canning of the 200-APS. " Yeah, that really caught me by surprise too. We (the company I work for) was really being given the hard sell on that product last summer. When I toured the Track factory in March they had tons of those 200 APS's under construction. However, when pressed hard, they admitted to only having a handfull installed worldwide. I think that they just had too poor a reputation for crappy reliability. That, in spite of the fact that they, at least at one time, had more DUV tracks installed worldwide than any other company. At least the Micrascan still seems popular. Hopefully the IV model will be out later this year, as I was told it would be last Spring. ASML and Canon will have their ArF systems out by the end of the year and those first few beta systems will be in high demand. James Word