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To: James Word who wrote (1867)	10/1/1998 11:14:00 PM
From: FJB	Read Replies (2) \| Respond to of 2946

James, Thanks for the info. Do you know how FSI is doing in track or is TEL eating everyone's lunch in that market? I recall you said TEL won Intel's buiness. I really like SVGL's chances in the ArF scanner market. Their reflective optics technology should allow them a higher throughput if they've improved the wafer stage design, since they can use free-running, higher power excimer lasers. Also, there seem to be some issues with the mass production of large CaF2 lenses for completely refractive scanners. I think the Micrascan-IV only uses CaF2 for a couple lens elements. ASML is expected to ship their first system of the newly announced model in Q1 to IMEC. Do you know what Canon's status in ArF is? TIA, for any thoughts, Bob