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To: FJB who wrote (1868)	10/1/1998 11:26:00 PM
From: James Word	Respond to of 2946

Robert: RE a bunch of stuff. TEL is definitely the company to beat in tracks with DNS a close second. I guess with SVG imploding that leave FSI being the last of the big US suppliers. FSI has a big presence at TI (who developed the early technology used in FSI tracks) and some at IBM. I don't know if they have any other big customers. As for CaF2 lenses, only a few elements in refractive stepper systems will be CaF2. But they are still tougher to produce for those systems than for an SVGL type systems. I think that Canon's latest public announcements put their ArF at a release date by the end of the year. The interesting thing about their next KrF system is that it will be easily convertable from 200mm to 300mm wafers. Nikon is the only company that seems to be AWOL on ArF. Oh, as for SVGL stages. They, at one time, were working on mag-lev stages. If they have commercialized those they would be the only ones doing it. That could be an advantage for them in the future. James Word