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To: Katherine Derbyshire who wrote (1870)	10/2/1998 12:19:00 AM
From: James Word	Read Replies (1) \| Respond to of 2946

Katherine RE: DUV lenses Reading your smiconductoronline article reminded me of that one disadvantage to the catadioptric lens design: The close proximity of the lens to the wafer. Ive heard stories about how companies like Intel have had to have their Micrascan lenses cleaned daily, or even shiftly. I guess that is primarily due to the Acetal-type DUV resists (they use a TOK product). This may be less of a factor going forward since most resist vendors are working hard to eliminate the outgassing from these resists. James Word