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To: blake_paterson who wrote (19997)10/25/1998 8:13:00 PM
From: Backfill  Read Replies (1) | Respond to of 25960
 
Good work Blake,

The question I have is more psychological then physical...when will the industry be totally committed to DUV? All the current top notch competing (x)RAMs and MPUs are using more levels of DUV then not.

Yet the industry still looks for the magic bullet that will take them past optical DUV. We don't even have a manufacturable 193 process yet, and 248 nm is just coming up to a competent level of support. Seems to me there is still a bunch of work and reward left in optical DUV.

Any insight would be appreciated.

Jeff