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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: Maurice S. Green who wrote (20154)11/9/1998 7:07:00 PM
From: FJB  Read Replies (1) | Respond to of 25960
 
DUV lithography uses light sources with wavelengths of 248nm/193nm and incorporates lenses to get the light to the wafer. EUV lithography is based on wavelengths of around 13nm and will require all reflective optics(mirrors). Over a year ago Cymer said they were in the design conceptualization stage with respect to an EUV source.

Here's a good article on the subject:
news.photonicsonline.com

One possible EUV source:
semibiznews.com