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Technology Stocks : JMAR Technologies(JMAR) -- Ignore unavailable to you. Want to Upgrade?


To: Im-patient who wrote (7052)11/25/1998 12:52:00 AM
From: Falstaff  Read Replies (2) | Respond to of 9695
 
Fred, here is some commentary:

As far as I can tell, no one knows yet what will prevail. Until I read your post, I would have bet that XRL would be used some time in the future, but I was not convinced that it would happen as quickly as JMAR believed it would. It is just common sense that optical techniques will be stretched to their limit before the industry will kick over to an entirely different approach. I always believed that EUV had a chance to produce circuits that are in the XRL regime, but did not know if the economics would make sense.

Optical techniques have already produced line widths of less than 180 nm, the "target" for XRL. Again, whether this is economical is the driving question for the near term. For the long term, XRL does seem attractive, but techniques like the hot electron could upend the XRL apple cart completely.

The official "road map" is published by SEMI. I'll see if I can find it somewhere. Also remember that laser plasma is not the only way to generate X-rays, and to date all the actual lithography research has been done with synchrotron sources.

Thank you very much for your post. I now have another blip on the screen, and this one looks to deserve very close attention.