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Technology Stocks : Lam Research (LRCX, NASDAQ): To the Insiders -- Ignore unavailable to you. Want to Upgrade?

To: Duker who wrote (2658)	3/18/1999 9:07:00 PM
From: Jong Hyun Yoo	Read Replies (2) \| Respond to of 5867

I am sorry I meant to write 9100 PTX instead of 9600 PTX. As you might know, 9600PTX is for the metal etch. As for 9100PTX, there are some problems. The process for 9100PTX runs under a very low pressure using high density plasma. The process has a great etch rate but it tends to have a low selectivity to the photoresist layer. However, this is not a problem that only Lam is facing. Even Applied Material's IPS etch system has the same problem when operated under the same low pressure. As far as I know, Tel does not have low pressure process. I hope that further improvement can be made with 9100PTX in the near future. Let's hope for the best...