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To: Volsi Mimir who wrote (816)	3/2/1998 1:09:00 PM
From: Andrew Vance	Read Replies (2) \| Respond to of 1305

You are quite astute in your observation. The first place I would be looking is KLAC for that type of equipment. I have a few contacts and will search this out. I used to remember other companies that had defect detection systems that used holographic techniques to find defects.(Insystems???) Wow, the memory is going. BTW-When I mentione KLAC, I should also mention the 500lb gorilla, AMAT since they do have Opal/Orbot, but KLAC has been a supplier to the mask/reticle industry for as long a sI can remember. Andrew

To: Volsi Mimir who wrote (816)	3/2/1998 7:47:00 PM
From: Crossy	Read Replies (2) \| Respond to of 1305

Eddy, let me quote your quote again.. Semiconductor Online article "According to Sheldon, defects are the most serious problem with phase shift masks. No tools are available to inspect masks at the exposure wavelength, so it's very difficult to identify phase defects. The etch process prevents 180ø phase errors, but smaller errors, while less serious, are more difficult to detect. " Now I happen to own Nanometrics (NANO), which also is into metrology. In the last week of January, they announced to have acquired key patents & assts of another company, dubbed "optical Specialties". Isnt' that this niche ?? They are citing "overlay registration" etc.. Here's the article: biz.yahoo.com Nanometrics Acquires Key Technology Rights From Optical Specialties SUNNYVALE, Calif.--(BUSINESS WIRE)--Jan. 30, 1998--Nanometrics Inc. (NASDAQ:NANO - news), announced today that it has licensed a key technology from Optical Specialties Inc. (OSI) of Fremont, Calif. Nanometrics has taken a license to manufacture a metrology system which is used to measure the critical dimensions and overlay registration achieved in submicron optical lithography. This is required for precise control of next generation multiple layer semiconductor manufacturing processes. Optical Specialties Inc. will provide its technology to Nanometrics who will design, manufacture and market these advanced metrology tools. Vincent J. Coates, chairman and CEO of Nanometrics, said, ''This well-established product is complementary to our present line of totally automated film thickness measurement tools. Our existing marketing and engineering skills can be applied to this new product to increase our customer base and broaden our company's capabilities in key areas of 'front end semiconductor metrology.' OSI's metrology products are already in wide use throughout the world. It will be Nanometrics' objective to use its existing sales and service capability to gain increased share of this attractive market.'' Jack R. Harris, chairman and CEO of Optical Specialties Inc. said, ''Our metrology product line (Metra Series) is a technology leader in the overlay registration market. This association with Nanometrics will provide the necessary resources to continue the high level of support and product development investment that our customers require. ''The technical capabilities of both organizations can meet the demands associated with the next generation of device designs, thus our customers will only benefit from this collaboration.'' The companies are in negotiation so that Nanometrics can obtain certain assets of OSI's metrology business. Nanometrics is a leading producer of automated systems used to measure physical dimensions of circuit elements. The Company has pioneered many developments in the measurement of sub-micron features on integrated circuits, flat panel displays and magnetic memory devices. All of the Company's products contain proprietary features and embedded computer software. Headquarters are in Sunnyvale with sales and service offices worldwide. This relationship includes forward-looking statements regarding Nanometrics manufacture and sale of products incorporating OSI's technology and a collaboration with OSI including Nanometrics' acquisition of additional assets from OSI. Actual results could differ and such differences could be material. Factors that could cause such differences, include Nanometrics' ability to integrate the technology, manufacture, sell and service new products and to complete negotiation and acquisition of additional assets. Also see risk factors set forth in the Company's Forms 10K and 10Q filed with the Securities and Exchange Commission. best wishes CROSSY