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To: BillyG who wrote (19021)	8/17/1998 2:18:00 PM
From: John A. Stoops	Read Replies (1) \| Respond to of 25960

Billy, I'll be worried in 10 years when this gets into production testing. Not now. John

To: BillyG who wrote (19021)	8/17/1998 2:20:00 PM
From: James Connolly	Read Replies (2) \| Respond to of 25960

Here is a link to more info on the EUV source. oir.ucf.edu The details are still sparce. It looks like the wavelength is about 13nm. I think this wavelength is really a soft x-ray. Such wavelengths are not easily focused (if at all). Hence the projected image would have to use a 1X mask which would be very difficult indeed. I also note that the source is almost a "point source" which will cause many uniformity issues. As far as I can see this technology will compete with future x-ray systems (7 years+) not present or future DUV. Regards JC.