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To: Ian@SI who wrote (1440)	3/5/1998 4:51:00 PM
From: FJB	Read Replies (1) \| Respond to of 2946

Ian, The scanning field can be lengthened through the use of a larger reticle. I don't know if the Micrascan is the only scanner with a stage capable of traveling the extra distance, or if its in the software or ??? Bob

To: Ian@SI who wrote (1440)	3/5/1998 9:35:00 PM
From: Tulvio Durand	Read Replies (1) \| Respond to of 2946

Ian, I did not quote you. Instead I thought I was paraphrasing what you said in the message being responded to. But here is the quote: 2. Technology: I believe that SVGI has at least 2 proven advantages. A. Its optics allow more light to be delivered to the wafer causing shorter times to expose the photoresist. B. Its scanning technology was also unique, permitting larger fields to be exposed with higher yields. Message 3430613 By "faster optics" I inferred mirrors were being used instead of lenses to account for the shorter exposure times. And I was (and still am) curious about how [B] above was accomplished. Tulvio