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General Lithography
An SI Board Since December 1996
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1305 39 0
Emcee:  Andrew Vance Type:  Unmoderated
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755 Not too long. There are supposedly some tricks for i-line within 0.25u design rAndrew Vance-2/5/1998
754 <i>I also see that no other technology will pop up to short circuit DUV nPink Minion-2/4/1998
753 Andrew: Thanks for the great post on DUV and Cymer. PS: Drop me a line if I S. Wallace Slough-2/4/1998
752 The thread is not dying. It is a very select thread that tries to keep and answAndrew Vance-2/4/1998
751 Does anyone have info on IBM's copper-deposition techniques for the CMOS chMason Barge-2/4/1998
750 Is this thread dying? Comments on DUV? techweb.com Mr. BPink Minion-2/4/1998
749 Mason, I agree with you whole-heartedly. In addition, the one thing that plagTheSpecialist-1/20/1998
748 I am just now ctaching up with stuff and wanted to respond to this post you madAndrew Vance-1/15/1998
747 Re: ADDITIONAL INFORMATION ON SEMICONDUCTOR LITHOGRAPHY How can anyone discusMason Barge-1/13/1998
746 Additional info also available from JMAR's home page at: jmar.com and jmar.Bilberry-1/13/1998
745 JMAR Industries Awarded $1.3 Million in New DARPA Funding to Initiate ConstructCandle stick-1/13/1998
744 Using silicon rich oxy-nitride for reflection control is the most current attacTheSpecialist-1/8/1998
743 Can anyone explain to me how the TI process is going to increase transistor denMason Barge-1/8/1998
742 Interesing stuff going on in TI's labs. techweb.cmp.comFJB-1/7/1998
741 Alan, I was under the impression that capacity buildup by CGW and others (like Crossy-1/2/1998
740 Some random lithography related news satellite.nikkei.co.jpFJB-1/1/1998
739 James, Yes, your explanation was quite helpful. I hadn't done the mathIan@SI-1/1/1998
738 Ian RE: Skipping a generation at Intel I think that the important point regarJames Word-1/1/1998
737 JW, Yes the german company is Heraeus. I believe they have a sub or joint Ian@SI-1/1/1998
736 <<I believe that the Quartz shortage is more in the imagination of some oMason Barge-1/1/1998
735 <<Was not someone saying that SVGI's latest MicraScan uses reflectiveMason Barge-1/1/1998
734 RE: Lenses and Quartz Does anyone remember the name of the European optical quJames Word-1/1/1998
733 Alan, I believe that the Quartz shortage is more in the imagination of somIan@SI-12/31/1997
732 Ian: I believe we have discussed the possibility of lithography tool manufactuAlan Gallaspy-12/31/1997
731 Happy new year Andrew (and all), Andrew, Could you provide a quick summary ofIan@SI-12/31/1997
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