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General Lithography
An SI Board Since December 1996
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1305 39 0
Emcee:  Andrew Vance Type:  Unmoderated
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705 The referenced article has NO impact on the use of DUV (both with KrF and the fTheSpecialist-12/2/1997
704 I'm not one of the technical people, but 10 WPH is way too slow for productFJB-11/27/1997
703 I would appreciate it if any of the technical people on this thread could commeS. Wallace Slough-11/27/1997
702 Thanks again, that was a great explanation. BobFJB-11/26/1997
701 RE: Is OPC technology universally used for 0.25 and under photolithography? If TheSpecialist-11/26/1997
700 Bob, Re: "Is OPC technology universally used for 0.25 and under photolithYousef-11/26/1997
699 Is OPC technology universally used for 0.25 and under photolithography? If notFJB-11/25/1997
698 <-you wrote- "Worth the wait. Now I can lose more money in Tech. stocksLLCF-11/25/1997
697 Refractive index homogeneity is defined as the uniformity of the angle at whichTheSpecialist-11/25/1997
696 Bob, the real surprise to me is that they expect to be using quartz with Argon-Mason Barge-11/21/1997
695 TS, I copied the press release as is(I'm not sure how much was lost in the FJB-11/21/1997
694 Is there any mention of refractive index homogeneity and birefringence of the TheSpecialist-11/21/1997
693 Quartz lens life extended. <i>The Osaka National Research Institute saidFJB-11/21/1997
692 News blurb. <i>NEC has developed high-precision aluminum circuit productiFJB-11/19/1997
691 Here is a link to a very accessable article on the state of lithography. It haAlan Gallaspy-11/15/1997
690 Sam, Andrew, James and thread, Some thoughts about DUV implementation and 0.18TheSpecialist-11/13/1997
689 Andrew RE: "More frustrating are the APD (Advanced Process Development) James Word-11/12/1997
688 John, *OFF SUBJECT*, kind of like a graveyard over there in the ISSM thread. ThGuinnessGuy-11/12/1997
687 Wow! Thanks for a great post, Andrew. If you ever get time, I'd love to heanonzeroa-11/12/1997
686 AV, thanks for your time, your explanation of possible problems in implementingMason Barge-11/12/1997
685 I would check on the following title and see when the most recent edition was pAndrew Vance-11/12/1997
684 My experience with lithography suggests the following (since I have not seen itAndrew Vance-11/12/1997
683 AV, If you still monitor this thread, perhaps you might care to comment on thiSam Citron-11/12/1997
682 Craig, *OFF SUBJECT* just visited issm, and wondered about Mr.Terry and john price-11/12/1997
681 <<"Why Cymer needs better tech?": Ans:SVGL uses mirrors others Mason Barge-11/10/1997
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